MKS NOVELLUS FLOW RATIO CONTROLLER DELTA 2 DLT2A2-28258 22-352113-00
$600.00
MKS Novellus Flow Ratio Controller
Delta 2
MKS P/N: DLT2A2-28258
Novellus P/N: 22-352113-00
Divides and controls mixed process gas flows to either multiple chambers or zones
Splits the gas into two separate output channels
Used in a variety of flow splitting applications such as etch, strip, and CVD
New
