LAM RESEARCH 4520 RAINBOW GAS PANEL- INTACT WITH MFC FOR AR, O2, CHF3, CF GAS
$5,500.00
Gas Panel for LAM Research 4520 Rainbow
Includes: Valves and MFCs.
Included:
Unit UFC-1200A
Range 200 SCCM
Gas: CF
Unit UFC-1200
Range: 100 SCCM
Gas: CHF3
Unit UFC-1200A
Range: 50 SCCM
Gas: O2
Unit UFC-1200A
Range: 200 SCCM
Gas: Ar
USED
