MKS CDN500R-15 AMAT 0190-37792 ETCH ENABLER INTERLOCK MODULE AS01500-15

The MKS CDN500R-15 Etch Enabler Interlock Module is a precision control component designed for process interlock and power distribution applications in semiconductor etch systems. Commonly used in Applied Materials (AMAT) etch tools, this module enables safe and coordinated operation between RF generators, vacuum controls, and process chambers.