APPLIED MATERIALS CTI CRYOGENICS NITROGEN COMPRESSOR BROOKS 8032664G001
$8,000.00
CTI Cryogenics Nitrogen Compressor
For use with Brooks Automation Wa
Wafer Chuck Cooling System
MPN: 8032664G001
SN: 1502CHE10315
Gas: N2
198-250 Vac @ 60 Hz- 1 Phase
180-220 Vac @ 50 Hz- 1 Phase
Max Input Power- 2.0 kw
Nominal Power Factor- 0.8
Comp. Full Load/ Lock Rotor Amperes- 12/30
Test Pressure- 400 PSIG/2758 KPa
