EPION CHAMBER CROSSING BROOKS AUTOMATION VAT 02112-BA24 9701-4615-01

$15,950.00

This product is unavailable

Epion Process Chamber


Includes the following:

Varian/Agilent TV301 Navigator Turbo Pump

Crossing Automation Loader#9701-5128-01

Vat Valve#02112-CHLI

Crossing Automation VAcuum Assy 9701-4615-01

Very little signs of use.  Pump was under vacuum until we opened process chamber for pics