EPION CHAMBER CROSSING BROOKS AUTOMATION VAT 02112-BA24 9701-4615-01
$15,950.00
Epion Process Chamber
Includes the following:
Varian/Agilent TV301 Navigator Turbo Pump
Crossing Automation Loader#9701-5128-01
Vat Valve#02112-CHLI
Crossing Automation VAcuum Assy 9701-4615-01
Very little signs of use. Pump was under vacuum until we opened process chamber for pics