CTI CRYOGENICS NITROGEN COMPRESSOR FOR BROOKS WAFER COOLING SYSTEM 8032664G001

$8,000.00

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CTI Cryogenics Nitrogen Compressor 

For use with Brooks Automation

Wafer Chuck Cooling System

MPN: 8032664G001

SN: 1502CHE10315

Gas: N2

198-250 Vac @ 60 Hz-  1 Phase

180-220 Vac @ 50 Hz-  1 Phase

Max Input Power- 2.0 kw

Nominal Power Factor-  0.8

Comp. Full Load/ Lock Rotor Amperes- 12/30

Test Pressure- 400 PSIG/2758 KPa